Computer-simulation and RBS/C studies of high-dose N⁺ and Al⁺ co-implantation in 6H-SiC

Computer-simulation and RBS/C studies of high-dose N⁺ and Al⁺ co-implantation in 6H-SiC

Kharlamov, V. S.; Kulikov, A. V.; Trushin, Y. V.; Tsigankov, D. N.; Yankov, R. A.; Voelskow, M.; Skorupa, W.; Pezoldt, J.

• Lecture (Conference)
  Int. Workshop on New Approaches to Hi-Tech Materials'97 - Nondestructive Testing and Comp. Simulat. in Mat. Sc. and Eng., St. Petersburg, Russia, June 9 - 12, 1997

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