High depth resolution ion scattering (ERDA and RBS) by means of an electrostatic spectrometer

High depth resolution ion scattering (ERDA and RBS) by means of an electrostatic spectrometer

Kruse, O.

• Lecture (Conference)
  4th Int. Workshop Measurements, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semicond., Res. Triangle Park, USA, April 6 - 9, 1997

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