Implantation in 3D-objects using plasma immersion ion implantation

Implantation in 3D-objects using plasma immersion ion implantation

Mändl, S.; Günzel, R.; Möller, W.

• Lecture (Conference)
  Spring Meeting, German Physical Society, Münster, Germany, March 17 – 21, 1997

Permalink: https://www.hzdr.de/publications/Publ-2421