Plasma immersion ion implantation of 3D-Objects

Plasma immersion ion implantation of 3D-Objects

Mändl, S.; Günzel, R.; Möller, W.

• Lecture (Conference)
  8th German Meeting on Plasma Technology, Dresden, Germany, Sept. 15 – 17, 1997

Permalink: https://www.hzdr.de/publications/Publ-2423