Cross-Section TEM analysis of Germanium nanoclusters in thin implanted SiO₂ films

Cross-Section TEM analysis of Germanium nanoclusters in thin implanted SiO₂ films

Markwitz, A.; Mücklich, A.; von Borany, J.; Matz, W.; Schmidt, B.; Möller, W.

• Lecture (Conference)
  Tagung Elektronenmikroskopie, Regensburg , Sept. 7 - 12, 1997

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