X-ray high resolution diffraction and reflectivity studies of the mechanical treatment related defects in opi-ready wafers

X-ray high resolution diffraction and reflectivity studies of the mechanical treatment related defects in opi-ready wafers

Mazur, K.; Sass, J.; Eichhorn, F.

• Lecture (Conference)
  3th Autumn School on "X-ray scattering from surfaces and thin layers", Smolenice, Slovakia, Oct. 1 - 4, 1997

Permalink: https://www.hzdr.de/publications/Publ-2426