Ion beam synthesis and characterization of buried (SiC)_1-x(AlN)_x layers in 6H-SiC

Ion beam synthesis and characterization of buried (SiC)_1-x(AlN)_x layers in 6H-SiC

Pezoldt, J.; Yankov, R. A.; Fukarek, W.; Hatzopoulos, N.; Brauer, G.; Anwand, W.; Kreißig, U.; Mücklich, A.; Voelskow, M.; Heera, V.; Skorupa, W.

• Lecture (Conference)
  39th Electronic Materials Conf., Fort Collins, Colorado, USA, June 25-27, 1997

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