Structural studies of buried (SiC)_1-x(AlN)_x layers fabricated by co-implantation of nitrogen and aluminium ions in 6H-SiC

Structural studies of buried (SiC)_1-x(AlN)_x layers fabricated by co-implantation of nitrogen and aluminium ions in 6H-SiC

Pezoldt, J.; Yankov, R. A.; Fukarek, W.; Hatzopoulos, N.; Voelskow, M.; Kreißig, U.; Mücklich, A.; Brauer, G.; Anwand, W.; Heera, V.; Skorupa, W.

• Lecture (Conference)
  7th Int. Conf. on Defect Recognition and Image Processing in Semiconductors (DRIP VII), Templin, Germany, Sept. 7 - 10, 1997

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