Modeling of implantation damage in silicon
Modeling of implantation damage in silicon
Posselt, M.
-
Invited lecture (Conferences)
Int. Workshop on Challenges in Predictive Process Simulation (ChiPPS'97), Wandlitz, Germany, Aug. 17 - 20, 1997 (invited lecture)
Permalink: https://www.hzdr.de/publications/Publ-2448