XRS and TEM investigations on argon profiled metal-silicon thin films

XRS and TEM investigations on argon profiled metal-silicon thin films

Reiche, R.; Oswald, S.; Thomas, J.; Wetzig, K.; Reuther, H.; Dobler, M.

• Lecture (Conference)
  7th European Conf. Appl. Surf. Interface Analysis, Göteborg, Sweden, June 16 - 20, 1997

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