Amorphization and Recrystallization of 6H-SiC by Ion Beam Irradiation

Amorphization and Recrystallization of 6H-SiC by Ion Beam Irradiation

Heera, V.; Kögler, R.; Skorupa, W.; Stoemenos, J.

• Journal of Applied Physics 77 (1995) 2999
  DOI: 10.1063/1.358649
  Cited 155 times in Scopus
• Poster
  Poster und Proceedings bei MRS Spring Meeting 1994, San Francisco, Mat. Res. Soc. Symp. Proc. 339 (1994) 197

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