Atomistic modeling of ion implantation within a 2d process simulator

Atomistic modeling of ion implantation within a 2d process simulator

Schmidt, B.; Posselt, M.; Strecker, N.; Feudel, T.

• Lecture (Conference)
  MRS Fall Meeting, Boston, USA, Dec. 1 - 5, 1997
• Contribution to external collection
  Mat. Res. Soc. Symp. Proc. 490 (1998) 21

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