A comparative study of ERDA, EELS and XPS for structural analysis of amorphous carbon nitride films

A comparative study of ERDA, EELS and XPS for structural analysis of amorphous carbon nitride films

Späth, C.; Kühn, M.; Richter, F.; Falke, U.; Hietschold, M.; Kilper, R.; Kreißig, U.

• Lecture (Conference)
  Int. Conf. Diamond '97

Permalink: https://www.hzdr.de/publications/Publ-2470