A computational model of the formation of (SiC)_1-x(AlN)_x structures by hot, high-dose N⁺ and Al⁺ coimplants in 6H-SiC

A computational model of the formation of (SiC)_1-x(AlN)_x structures by hot, high-dose N⁺ and Al⁺ coimplants in 6H-SiC

Trushin, Y. V.; Yankov, R. A.; Kharlamov, V. S.; Kulikov, D. V.; Tsigankov, D. N.; Kreißig, U.; Voelskow, M.; Pezoldt, J.; Skorupa, W.

• Lecture (Conference)
  Int. Conf. on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, Aug. 31 - Sept. 5, 1997

Permalink: https://www.hzdr.de/publications/Publ-2473