Impurity gettering effects in separation-by-implanted-oxygen (SIMOX) structures - what getters what, where and how

Yankov, R. A.; Kaschny, J. R.; Fichtner, P. L. F.; Mücklich, A.; Kreißig, U.; Skorupa, W.

Lecture (Conference)
10th Biennial Conf. on Insulating Films on Semiconductors, Stenungsund, Sweden, June 11 - 14, 1997

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