Proximity gettering of transition-metal impurities in separation-by-implanted-oxygen (SIMOX) structures using buried carbon- and helium-implanted layers

Proximity gettering of transition-metal impurities in separation-by-implanted-oxygen (SIMOX) structures using buried carbon- and helium-implanted layers

Yankov, R. A.

• Lecture (others)
  Naval Res. Lab, Electronics Division, Washington D.C., USA, Nov. 26, 1997

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