Gettering of iron and oxygen at cavities formed by helium ion implantation in Czochralski and float-zone silicon

Gettering of iron and oxygen at cavities formed by helium ion implantation in Czochralski and float-zone silicon

Kaschny, J. R.; Fichtner, P. F. P.; Yankov, R. A.; Fukarek, W.; Mücklich, A.; Kreißig, U.; Peeva, A.; Danilin, A. B.; Skorupa, W.

• Lecture (Conference)
  E-MRS´98, Strasbourg, June 16-19, 1998

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