Spatial distribution of gettering centres in ion-implanted and annealed silicon

Spatial distribution of gettering centres in ion-implanted and annealed silicon

Kögler, R.; Eichhorn, F.; Mücklich, A.; Skorupa, W.; Danilin, A. B.

• Lecture (Conference)
  11th. Int. Conf. on Ion Beam Modification of Materials, Amsterdam, The Netherlands, Aug. 31 - Sept. 4, 1998

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