Electrical and microstructural effects in highly doped 6H-SiC after Al-implantation

Wirth, H.; Panknin, D.; Perez-Rodriguez, A.; Brauer, G.; Anwand, W.; Voelskow, M.; Skorupa, W.

Lecture (Conference)
40th Electronic Materials Conference (EMC´98), Charlottesville, Virginia, USA, June 24-26, 1998

Permalink: https://www.hzdr.de/publications/Publ-2567