Helium and Neon ion based microscopy and nanofabrication

Helium and Neon ion based microscopy and nanofabrication

Hlawacek, G.

Involved research facilities

• Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

• DOI: 10.17815/jlsrf-3-159 is cited by this (Id 26892) publication

• Lecture (Conference)
  SiC workshop, 08.12.2017, Dresden, Deutschland

Permalink: https://www.hzdr.de/publications/Publ-26892