Characterization of drills implanted with nitrogen plasma immersion ion implantation

Characterization of drills implanted with nitrogen plasma immersion ion implantation

Mändl, S.; Günzel, R.; Möller, W.; Hilke, R.; Knösel, E.; Künanz, K.

• Lecture (Conference)
  SMMIB 97, Gatlinburg, TE, USA, Sept. 1997

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