Atomistic simulation of ion implantation into real 2d structures

Atomistic simulation of ion implantation into real 2d structures

Schmidt, B.; Posselt, M.; Strecker, N.; Feudel, T.

• Lecture (Conference)
  Int. Workshop on Challenges in Predictive Process Simulation (ChiPPS'97), Wandlitz, Germany, Aug. 17 - 20, 1997

Permalink: https://www.hzdr.de/publications/Publ-2721