New detection system for transmission imaging in the helium ion microscope


New detection system for transmission imaging in the helium ion microscope

Serralta Hurtado De Menezes, E.; Klingner, N.; de Casto, O.; Duarte Pinto, S.; Bebeacua, C.; Findeisen, S.; Bouton, O.; Wirtz, T.; Hlawacek, G.

Transmission imaging in the helium ion microscope allows to measure mass-thickness contrast and reveal crystallographic information. We recently customized a microchannel plate followed by a delay line readout structure especially for this application. This system can correlate the scanning transmission ion image to the angular distribution of the transmitted ions. An in-vacuum linear support is used to place the detector at different distances from the sample, adjusting the maximum collection angle. Post-processing allows the reconstruction of images for selected scattering angles. The first results show images with nanometer resolution, material contrast, and identification of sub-surface features in biological tissues. This work has been supported by the H2020 Project npSCOPE under grant number 720964.

Keywords: Helium Ion Microscopy; Scanning Transmission Ion Imaging; HIM; STIM

Involved research facilities

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  • Lecture (Conference)
    DPG Spring Meeting of the Condensed Matter Section (SKM), 15.-20.03.2020, Dresden, Deutschland

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