Modeling of impurity gettering in silicon by ion implantation induced defects

Modeling of impurity gettering in silicon by ion implantation induced defects

Heinig, K.-H.; Jäger, H.-U.

• Lecture (Conference)
  E-MRS Spring Meeting, Symposium F - Process Induced Defects in Semiconductors, Strasbourg, France, June 1-4, 1999

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