Computer simulation of defect evolution during high-energy ion implantation and subsequent annealing

Computer simulation of defect evolution during high-energy ion implantation and subsequent annealing

Heinig, K.-H.; Jäger, H.-U.

• Lecture (Conference)
  IUMRS-ICAM99 Conference, Symposium M: Si-based Materials and Devices, Beijing, China, June 13- 18, 1999

Permalink: https://www.hzdr.de/publications/Publ-3146