Helium Ion Microscope based nanofabrication

Helium Ion Microscope based nanofabrication

Hlawacek, G.

Keywords: HIM; nanofabrication; GFIS

Involved research facilities

• Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

• DOI: 10.17815/jlsrf-3-159 is cited by this (Id 32230) publication

• Lecture (others) (Online presentation)
  Nanofabrication webinar series @ Master on Advanced Nanoscience and Nanotechnology, 23.04.2020, Barcelona, Spain
• Lecture (others) (Online presentation)
  Webinar series on Advances Nanofabrication, 26.02.-9.4.2021, Barcelona, Spanien

Permalink: https://www.hzdr.de/publications/Publ-32230