Synchrotron radiation studies of thin films and implanted layers with the Materials Research Endstation of ROBL


Synchrotron radiation studies of thin films and implanted layers with the Materials Research Endstation of ROBL

Schell, N.; Matz, W.; Prokert, F.; Eichhorn, F.; Berberich, F.

An overview of the beamline design is given. The basic experimental equipment of the materials research hutch (MRH), i.e. the special six-circle diffractometer for heavy duty, a beam-deflector for investigations of liquids with free surfaces, special sample environments (high-temperature chambers) and the various detector systems (scintillator, photo-diode, 2-dim. CCD camera) will be described.

As represantative results so far obtained at ROBL-MRH the following scientific topics of the Institute of Ion Beam Physics and Materials Research of the Forschungszentrum Rossendorf are presented in more detail:

 Stress relaxation and precipitation of SiC in Si implanted with C;
 X-ray reflectivity and diffuse scattering on Co/Cu-multilayers near the absorption edges;
 Phase transformations studied in-situ during annealing of Ti4Al6V implanted with nitrogen.

Keywords: synchrotron radiation; X-ray diffraction; X-ray reflectometry

  • Journal of Alloys and Compounds, 328 (2001) 105-111

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