In-situ GISAXS observation of ion-induced nanoscale pattern formation on crystalline Ge(001) in the reverse epitaxy regime

The ion-induced nanoscale pattern formation on a crystalline Ge(001) surface is observed in-situ by means of Grazing Incidence Small Angle X-ray Scattering (GISAXS). Analysis of the GISAXS intensity maps yields the temporal develoment of geometric parameters characterizing the changing pattern morphology. In comparison with theoretical predictions and with simulations of the patterning process based on a continuum equation we find good agreement for the temporal evolution of the polar facet angle, characteristic length, and surface roughness in the non-linear regime. To achieve this agreement, we included an additional term in the continuum equation which adjusts the pattern anisotropy.