Atomic modelling of ion implantation processes (Part I)
Atomic modelling of ion implantation processes (Part I)
Posselt, M.
The transparencies of this lecture can be requested. Email: M.Posselt@fz-rossendorf.de
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Lecture (Conference)
International Summer School of the European Network on Defect Engineering of Advanced Semiconductor Devices, Kista-Stockholm, Sweden, June 24-26, 2000
Permalink: https://www.hzdr.de/publications/Publ-3443