Atomistic simulation of ion implantation into different polytypes of SiC
Atomistic simulation of ion implantation into different polytypes of SiC
Ster, A.; Posselt, M.; Hallen, A.; Janson, M.
Informations can be requested. Email: M.Posselt@fz-rossendorf.de
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Poster
13th International Conference on Ion Implantation Technology, Alpbach, Austria, September 17-22, 2000 -
Contribution to external collection
Proc. 2000 Int. Conf. on Ion Implantation Technology, Alpbach, Austria, September 17 -22, eds.: H. Ryssel, L. Frey, J. Gyulai, H. Glawischnig, IEEE, Piscataway, USA, 2000, IEEE Publications 00EX432, p. 220
Permalink: https://www.hzdr.de/publications/Publ-3532
