Cathodic arc deposition of nanoscale multilayers: experiments and computer simulations

Cathodic arc deposition of nanoscale multilayers: experiments and computer simulations

Chun, S. Y.; Chayahara, A.; Horino, Y.; Posselt, M.; Möller, W.

Informations can be requested. Email: M.Posselt@fz-rossendorf.de

  • Poster
    12th International Conference on Ion Beam Modification of Materials, Canela, Brazil, September 3-8, 2000

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