Experimental Result of a DC Glow Discharge Source with Controlled Plasma Floating Potential for Plasma Immersion Ion Implantation
Experimental Result of a DC Glow Discharge Source with Controlled Plasma Floating Potential for Plasma Immersion Ion Implantation
Berni, L. A.; Ueda, M.; Gomes, G. F.; Beloto, A. F.; Reuther, H.
In some PIII devices the sputtering of the surface under treatment is a problem to overcome.
- Journal of Physics D: Applied Physics 33 (2000) 1592-1595
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