Structural peculiarities of metal alloy and multilayer films synthesized from the laser erosion plasma
Structural peculiarities of metal alloy and multilayer films synthesized from the laser erosion plasma
Gorbunov, A.; Tselev, A.; Levin, A.; Mensch, A.; Meyer, D.; Noetzel, J.; Prokert, F.; Pompe, W.
Results of experimental investigations of thin films and multilayers of binary systems deposited by PLD at room temperature are presented. Poles of sputtering, implantation, rapid quenching, and solid state diffusion in microstructure formation of thin metal an alloy films synthesized prom pulsed erosion jets are considered. Examples of non-conventional microstructure (amorphization, pseudomorphism, superstructures) formation are given.
Keywords: PLD; thin films; ion beams; microstructure; amorphization; superstructure
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Poster
Proc. SPIE -
Abstract in refereed journal
Laser-Assisted Microtechnology 2000, ed. by V. P. Veiko, Proc. SPIE 4157, 257-262 (2001) -
Contribution to external collection
Proc. SPIE
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