Design Considerations for Plasma Immersion Ion Implantation Systems

Design Considerations for Plasma Immersion Ion Implantation Systems

Mändl, S.; Brutscher, J.; Günzel, R.; Möller, W.

• Nuclear Instruments and Methods in Physics Research B 112 (1996) pp. 252-254
  DOI: 10.1016/0168-583X(95)01276-1
  Cited 11 times in Scopus

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