Investigation of Co/Cu/NiFe-Multilayers by X-Ray Reflectometry and Diffraction

Structural properties of sputtered multilayers with different Co-, Cu- and NeFe- sequences of about 2nm individual layer thickness were investigated by means of synchrotron radiation techniques. Correlations between the layer combination and structural parameters such as layer thickness and rms interface roughness derived from specular scans were obtained, whereas the lateral characteristics of the interface morphology investigated by diffuse scattering were found to be similar for all multilayers. Wide angle diffraction measurements yielded lattice plane information, e.g. size-strain effects due to profile broadening and predominating <111> fibre textures.