Ion Drift Behaviour in Borosilicate Glasses during Anodic Bonding to Silicon or Metals

Ion Drift Behaviour in Borosilicate Glasses during Anodic Bonding to Silicon or Metals

Lange, K.; Grigull, S.; Kreißig, U.; Schmidt, B.; Harz, M.

• Contribution to proceedings
  Proceedings of the 3rd International Symposium on Semiconductor Water Bonding, Proceedings-Volume 97-7 (The Electrochemical Society Inc., Pennington, New Jersey, 1995)

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