Sheath Dynamics in Plasma Immersion Ion Implantation

Sheath Dynamics in Plasma Immersion Ion Implantation

Brutscher, J.; Günzel, R.; Möller, W.

• Plasma Sources Science and Technology 5 (1996) pp. 54-60
  DOI: 10.1088/0963-0252/5/1/007
  Cited 38 times in Scopus
• Surface & Coatings Technology 85 (1996) pp. 98-104
  DOI: 10.1016/0257-8972(96)02883-6
  Cited 8 times in Scopus

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