Proximity gettering of transition metals in separation by implanted oxygen structures

Proximity gettering of transition metals in separation by implanted oxygen structures

Skorupa, W.; Hatzopoulos, N.; Yankov, R. A.; Danilin, A.

• Applied Physics Letters 67 (1995) 20 pp.1-3
  DOI: 10.1063/1.114929
  Cited 39 times in Scopus

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