Evidence for diffusion-limited kinetics of ion-beam-induced epitaxial crystallization in silicon

Evidence for diffusion-limited kinetics of ion-beam-induced epitaxial crystallization in silicon

Heera, V.; Henkel, T.; Kögler, R.; Skorupa, W.

• Physical Review B 52 (1995) 22 pp. 15 776-784
  DOI: 10.1103/PhysRevB.52.15776
  Cited 56 times in Scopus

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