Protection of TiAl alloys against high temperature oxidation by Chlorine Plasma Immersion Ion Implantation

The effect of plasma immersion ion implantation of chlorine on the high temperature oxidation of titanium aluminides alloys was investigated. PIII implantations of Cl2 at 30 kV (effective energy 15 keV) show a strong reduction of the oxidation at 900°C in air, which is comparable to conventional beam line im-plantations of Cl at 15 keV. A specialized PI³ system for the strongly etching Cl2 plasma was set up. The chamber is coated inside with aluminum foil, in order to protect the chamber and to avoid contamination of the plasma except with Al. The pumping system is chemically resistant. First implantations and plasma diagnostic of an ICP source sustained Cl2 plasma are discussed. The effect on the high temperature oxidation behavior is tested using thermogravimetrical analysis and microstructural investigations