A study of liquid metal alloy ion sources for the production of ions of interest in the microelectronics industry

This is a comprehensive study of the characteristics of an AuGeSi and CoNd liquid metal alloy ion sources [Focused ion beams from liquid metal ion sources, 1991]. Such characteristics include current-voltage curves and ion beam mass-spectra. A careful investigation has been undertaken where the temperature is one of the main variable experimental parameters. Theoretical models support the experimental results.