Antimony implanted in silicon-a thin layer reference material for surface analysis
Antimony implanted in silicon-a thin layer reference material for surface analysis
Ecker, K. H.; Berger, A.; Grötzschel, R.; Persson, L.; Wätjen, U.
A reference material has been produced which can be used for the calibration of surface - and near-surface analytical methods.
Keywords: Certified reference material; RBS; Instrumental neutron activation analysis
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Volumes 175-177 (2001)797
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