Ion Beam Induced Amorphization and Epitaxial Crystallization of 6H-SiC

Ion Beam Induced Amorphization and Epitaxial Crystallization of 6H-SiC

Heera, V.; Kögler, R.; Skorupa, W.; Glaser, E.; Bachmann, T.

• Poster
  ECAART '93, Orleans, France

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