Cluster beams from a Co-Nd liquid alloy ion source

A Cobalt-Neodymium Liquid Alloy Ion Source (LAIS) is investigated with respect to ist cluster emission behaviour. Clusters and molecular ions were found. The influence of the source emission current on the cluster emission intensity and also on the cluster mass distributationis studied. The Co-Nd LAIS was used for writing patterning (implantation, sputtering) in a mass-selecting Focused Cluster Beam (FCB) system. Theoretical estimations were carried out concerning the use of the FCB for direct deposition at landing energies of about 100 eV / atom. First experimental results of cobalt FCBs are presented.