Design of an achromatic mass separator for a focused ion beam system
Design of an achromatic mass separator for a focused ion beam system
Teichert, J.; Tiunor, M. A.
Abstract
The design of an achromatic mass separator which consists of two ExB filters, a stigmator, and the separation aperture is descibed. The optical properties of the ExB filters are derived. The influence of the designd mass are shown.
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Contribution to external collection
SPIE Vol 2014 Charged-Particle Optic (1993) 85
DOI: 10.1117/12.155687
Permalink: https://www.hzdr.de/publications/Publ-47
