Integrated high voltage modulator for plasma immersion implantation
Integrated high voltage modulator for plasma immersion implantation
Rogozin, A.; Günzel, R.
no abstract delivered from author
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Lecture (Conference)
6.th Int. Workshop on Plasma-based Ion Implantation, Grenoble, June 25-28, 2001
Permalink: https://www.hzdr.de/publications/Publ-4858