Investigation of MOS structures with embedded Si-nanocrystals obtained by r.f.-sputtering

Investigation of MOS structures with embedded Si-nanocrystals obtained by r.f.-sputtering

Schmidt, J. U.; Schmidt, B.

no abstract delivered from author

  • Poster
    12th Int. School VEIT´01, Varna, Bulgaria, Sept.17-21, 2001

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