Nanocluster formation: Atomistic simulations and impact of atmospheric humidity

Heinig, K.-H.; Schmidt, B.; Müller, T.

no abstract delivered frm author

Keywords: ion implantation; Ge and Si nanocluster formation; damaged oxide; moisture penetration

Lecture (others)
EC project meeting NEON, CEMES/CNRS, Toulouse, France, Jan 31 -Feb 4, 2001

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