Range distributions of low-energy carbon ions in tetrahedral amorphous carbon thin films

Range distributions of carbon ions deposited onto tetrahedral amorphous carbon films at kinetic energies between 22 eV and 692 eV are measured utilizing high-resolution elastic recoil detection. These data are compared to range calculations based on binary collision approximation as well as to classical molecular dynamics simulations. Asymmetric range profiles, differences in mean ion ranges and increased range straggling compared to theories are attributed due to self diffusion during thermal spike and have to be considered in subplantation growth models.