Influence of the deposition conditions on the stucture of tetrahedrally bonded amorphous carbon films - a simulation approach

The extremely broad structural variability of carbon films is based on the competition of trigonal sp² bonds leading to layered structures (as in graphite) and tetrahedral sp³ bonds leading to three-dimensional networks (as in diamond). These complementary structures may be combined in amorphous carbon films as they are produced by highly activated ion or plasma beams. Amorphous films with up to 80% diamond bonds and corresponding hardness has been realized in this way. The necessary deposition conditions are qualitatively well known: high particle energy, low deposition temperature, not too grazing incidence.
A more detailed analysis shows that several stages should be considered corresponding to different dominating processes on very different time scales. For investigation of the film growth in the short time impact stage molecular dynamics was used. For this purpose the empirical interaction potential of Brenner was modified to describe film formation by hyperthermal species. By optimised codes and long-time calculations of several months, it was for the first time possible to simulate the stationary growth of carbon films of several nanometer thickness. The film structure (interface, diamond-like bulk film, graphitic top layer) was quantitatively analysed in dependence on particle energy and temperature.
The results of the impact stage represent the input data for the long time diffusion stage. Based on continuum mechanics a simplified model for the further film formation has been developed. It describes the formation of the different carbon structures (characterized by the density or the corresponding sp² : sp³ ratio) as a competition of subplantation and relaxation, so it becomes possible to quantify the influence of more complex technological parameters like beam energy distribution and thermal transport. The characteristic tendencies extracted from these technological maps are discussed and compared to experimental results.